| 个/M3≥0.5um | ISO 14644-1(1999) |
US 209E(1992) |
US 209D(1988) |
EEC GGMP(1989) |
FRANCE AFNOR(1981) |
GERMANY VDI 2083(1990) |
JAPAN JAOA(1989) |
| 1 | - | - | - | - | - | - | - |
| 3.5 | 2 | - | - | - | - | 0 | 2 |
| 10.0 | - | M1 | - | - | - | - | - |
| 35.3 | 3 | M1.5 | 1 | - | - | 1 | 3 |
| 100 | - | M2 | - | - | - | - | - |
| 353 | 4 | M2.5 | 10 | - | - | 2 | 4 |
| 1,000 | - | M3 | - | - | - | - | - |
| 3,530 | 5 | M3.5 | 100 | A+B | 4,000 | 3 | 5 |
| 10,000 | - | M4 | - | - | - | - | - |
| 35,300 | 6 | M4.5 | 1,000 | 1,000 | - | 4 | 6 |
| 100,000 | - | M5 | - | - | - | - | - |
| 353,000 | 7 | M5.5 | 10,000 | C | 400,000 | 5 | 7 |
| 1,000,000 | - | M6 | - | - | - | - | - |
| 3,530,000 | 8 | M6.5 | 100,000 | D | 4,000,000 | 6 | 8 |
| 10,000,000 | - | M7 | - | - | - | - | - |
