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洁净室及洁净区空气中悬浮粒子洁净度等级
From： Time：2014-05-16 0:01:55
| 空气洁净度等级(N) |
大于或等于表中粒径的最大浓度限值(pc/m3) |
| |
0.1um |
0.2um |
0.3um |
0.5um |
1um |
5um |
| 1 |
10 |
2 |
|
|
|
|
| 2 |
100 |
24 |
10 |
4 |
|
|
| 3 |
1000 |
237 |
102 |
35 |
8 |
|
| 4 |
10000 |
2370 |
1020 |
352 |
83 |
|
| 5 |
100000 |
23700 |
10200 |
3520 |
832 |
29 |
| 6 |
1000000 |
237000 |
102000 |
35200 |
8320 |
293 |
| 7 |
|
|
|
352000 |
83200 |
2930 |
| 8 |
|
|
|
3520000 |
832000 |
29300 |
| 9 |
|
|
|
35200000 |
8320000 |
293000 |
